Surface cleaning solutions developed for high-end processes.

Our Brush Scrubber Cleaner provides a high-stability, highly integrated dry/wet复合式 surface cleaning solution for high-cleanliness requirements in high-tech processes. The equipment incorporates high-precision servo-controlled brush systems, which can be paired with multi-stage chemical treatment, ultrapure water rinse, and air knife drying modules to effectively remove particles and chemical residues from surfaces of substrates like wafers, glass panels, and PCBs.

Core Functions & Technical Features:

• Servo-Driven Precision Brush Module:
  Configured with dual-axis brush heads driven by high-speed servo motors, allowing programmable settings for different materials and contaminants, ensuring a balance between cleaning power and substrate integrity.
• Multi-Stage Cleaning & Liquid Handling Process:
  Supports processes using acidic/alkaline chemicals, ultrapure water, IPA, surfactants, etc., with independent flow paths and precise flow control to prevent cross-contamination.
• Modular Air Knife & Drying System:
  Combines high-speed air knives with IR/hot air drying modules to ensure zero watermarks, improve drying efficiency, and reduce defect rates.
• Intelligent Control & Process Monitoring Interface:
  Built-in high-end PLC and touch-screen HMI, supports parameter recipe storage, real-time process monitoring, and remote diagnostics. Can integrate with MES/Supervisory systems.
• Cleanroom-Grade Equipment Construction:
  Entire machine uses SUS 304/316 and chemical-resistant engineering plastics, meeting requirements for use in ISO Class 4 or higher cleanrooms.

Application Fields:

✔️ Wafer manufacturing (Front-End / Back-End)

✔️ Optoelectronic display panels (TFT-LCD / AMOLED)

✔️ Conductive film substrate cleaning (ITO / PET)

✔️ PCB manufacturing process cleaning

✔️ Automotive electronics / 3rd generation semiconductor material surface treatment